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Introduction of MEMS
Title (1)
About Author (1)
Outline (1)
What is MEMS? (8)
Silicon Material (2)
Wafer Cleaning (2)
Photolithography (9)
Additive Process (27)
Subtractive Process (15)
Device Release (1)
Device Packaging (42)
MEMS Accelerometer (12)
MEMS Future (1)
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Introductioin to MEMS and Micromachining Technologies
by Dr. Hung-I Kuo
[1]
Introduction of MEMS